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Laser measurement system with 6 DOF

6 DOF measurement system
Interferometer MS-6: a multi-axis system for measuring geometric errors of coordinate measuring machines and numerically controlled machine tools. The laser system allows for simultaneous measurement of all 3 translational errors and 3 rotational errors of the axis under examination, enabling:

  1. Linear measurement in the range of 4 m with a relative uncertainty of 0.5*10-6 (0.5 μm/m)
  2. Straightness measurement in the range of ± 0.2 mm with an uncertainty of ± (2 μm + 0.01 measured deviation) or 0.1% of the measured value range
  3. Measurement of tilt angles (pitch*) and rotation (yaw*) in the range of ± 400 arcseconds with an uncertainty of ± (0.6 arcseconds + 0.05 arcseconds/m)
  4. Measurement of roll angle in the horizontal axis (roll*) in the range of ± 400 arcseconds with an uncertainty of ± 1.5 arcseconds
  5. Parallelism measurement with an uncertainty of ± (1.0 arcsecond + 0.2 arcsecond/m + 0.033 indication)
  6. Perpendicularity measurement with an uncertainty of ±(1.0 arcsecond + 0.2 arcsecond/m + 0.033 indication)
  7. Measurement components of the system are mounted on the machine’s spindle, with a mass not affecting the measurement accuracy (220 g).
 

The system provides digital compensation/correction of environmental conditions with the following uncertainties for individual sensors (not worse than specified):

  • Air temperature ± 0.1 °C
  • Pressure ± 1 hPa
  • Relative humidity ± 5%
  • Material temperature ± 0.1 °C
 

The roll error can be measured by the laser system (accuracy of 4 arcseconds) and by a digital level (accuracy of 0.6 arcseconds).

Measurement system components:

  1. Laser head with power supply system
  2. Reflector (4 retroreflectors)
  3. Right angle etalon 50/50%
  4. Precision pentaprism for changing the measurement direction
  5. Set of cables
  6. Electronic level module
  7. Additional position detector of the laser beam (useful in scientific research)