Laser measurement system with 6 DOF
Interferometer MS-6: a multi-axis system for measuring geometric errors of coordinate measuring machines and numerically controlled machine tools. The laser system allows for simultaneous measurement of all 3 translational errors and 3 rotational errors of the axis under examination, enabling:
- Linear measurement in the range of 4 m with a relative uncertainty of 0.5*10-6 (0.5 μm/m)
- Straightness measurement in the range of ± 0.2 mm with an uncertainty of ± (2 μm + 0.01 measured deviation) or 0.1% of the measured value range
- Measurement of tilt angles (pitch*) and rotation (yaw*) in the range of ± 400 arcseconds with an uncertainty of ± (0.6 arcseconds + 0.05 arcseconds/m)
- Measurement of roll angle in the horizontal axis (roll*) in the range of ± 400 arcseconds with an uncertainty of ± 1.5 arcseconds
- Parallelism measurement with an uncertainty of ± (1.0 arcsecond + 0.2 arcsecond/m + 0.033 indication)
- Perpendicularity measurement with an uncertainty of ±(1.0 arcsecond + 0.2 arcsecond/m + 0.033 indication)
- Measurement components of the system are mounted on the machine’s spindle, with a mass not affecting the measurement accuracy (220 g).
The system provides digital compensation/correction of environmental conditions with the following uncertainties for individual sensors (not worse than specified):
- Air temperature ± 0.1 °C
- Pressure ± 1 hPa
- Relative humidity ± 5%
- Material temperature ± 0.1 °C
The roll error can be measured by the laser system (accuracy of 4 arcseconds) and by a digital level (accuracy of 0.6 arcseconds).
Measurement system components:
- Laser head with power supply system
- Reflector (4 retroreflectors)
- Right angle etalon 50/50%
- Precision pentaprism for changing the measurement direction
- Set of cables
- Electronic level module
- Additional position detector of the laser beam (useful in scientific research)